접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Semi-auto resistivity measurement system
RT-3000/RG-15D
- Rs:1m~1GΩ/□
- Res:1μ~1MΩ·cm
- Applications : Silicon ingot
- Ingot sizes : 50∼205 mm in diameter
                    (Option; 305 mm in diameter)
                    (length/weight; 30∼600 mm L / 50kg)




- Multi-point auto measurement of silicon ingot end face (Option: docking with ingot  handler)
- Tester self-test function, measurement position and temperature correction function

- Measurement for silicon ingot diameter and length

- High performance test result for high resistivity ingot up to 100 k Ω·cm

- Silicon wafer measurement available