접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Semi-auto Rs/Res. measurement system
CRESBOX
- Rs:5.0mΩ/sq~10.0MΩ/sq
- Res:1.0mΩ•cm ~300kΩ•cm ( t=100~2000μm )
- Applications : Silicon wafer, conductive layer on glass/film and more
- Sample size : 2"~8"Ф, max.156mmSQ



- All-in-one instrument of resistivity tester and measuring stage 
  (Small foot print)

- Without PC operation (stand-alone use) or PC operate system type 
   is available

- Shutter mechanism guard measurement from outside influence

- Round and square shape measuring pattern programmable
  (in use PC operate)

- Tester self-test function, wide measuring range

- Thickness, edge, temperature correction for silicon wafer

- Film thickness conversion function from sheet resistance (in use PC operate)

- Mapping software: Up to 1,225 points (Option)