접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
4 point probe head
Miniature type
Napson 4-point resistivity / sheet resistance systems are using high performance probe heads which are made by Jandel Engineering Limited of England. Jandel probe head performs high precise measurement of resistivity and sheet resistance for silicon wafers, epitaxial layers, diffusion layers, ITO layers, metal layers and more, so that Jandel probes have a good evaluation for many years.




*Load (needle pressure) is always suitable since using V type spring *Probe spacing accuracy and probe stability is excellent since anodized aluminum alloy upper and lower guides are jeweled
*Less damage of probe needle tips - Solid tungsten carbide needles for superior durability



The probe type is chosen under the material of measuring sample, the surface state, the form etc.

(Reference)








































Sample surface


Probe head
(Material/Radius)


Load
/Needle


Silicon Ingots / Block


TC-40u


200g


Silicon Slice


TC-40u


200g


Epitaxial Layers


TC-150u


100g


Epitaxial Layers (Thin film)


TC-150u, 500u


50g


Shallow Diffused -layers (Thin film)


OS-200u, 500u


50g


Diffused Layers


OS-200u
TC-150u


100g


Ion Implantation


TC-150u


50g, 100g


Metal (Thin film), ITO


TC-150u, 500u


25g, 50g
100
g


*The other types are available.
*If you would like to have a special spec, contact us.


(Specifications)
TC-40u-200g/1.00mm
- Needle Material: TC (Tungsten carbide)
    (TC or OS: Osmiun alloy) 
- Radius: 40 um (25 um to 500 um)
- Loads (g/needle): 200
g (10g to 250g)
  - Spacing: 1.00 mm    (0.5 mm to 1.59 mm) 
  - Arrangement: Linear (standard) 
    (Square is available)