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 제품별 |
 제품별 |
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Wafer lifetime tester |
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HF-300 |
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- Measuring range : 0.1μS-1000μS (*Compatioble to resistivity range : 0.1~1000Ω•cm)
- Applications : Silicon wafer, brick (bulk)
- Sample sizes : Wafer - [Square] ~210mmSQ
[Circle] ~200mm
Brick - Max. 210(W) x 500(D) x 210(H) mm |
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- Non-contact, non-damage lifetime measurement by μ-PCD
- Suitable for mono-crystalline and poly-crystalline silicon wafer
- Passivation waith exclusive capsule (for wafer sample)
- [Laser unit]
- Type : Semiconductor laser diode
- Wave length : 905nm (for wafer) / 1000nm (for brick)
- Peak power : 60W
- Pulse width : 80nS
- Resistivity measurement [4PP or N] (option)
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