접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Full Auto Rs measurement system
NC-60F/RS-1300N
- Rs:  [ITO] 5Ω/sq∼800Ω/sq
        [Metal thin film] 10mΩ/sq∼10Ω/sq
- ITO film Thickness : 20 nm (200Å)~500 nm (5,000Å)
- 4-PP : 1m~10MΩ/sq or 10m~1GΩ/sq
- Applications : Conductive layer on glass
- Glass size : Under design 2880mm x 3080mm



- Fully automatic system by a supplied glass loading/unloading robot

- Non-contact sheet resistance measurement for non-Cr ITO layer on glass (ex. color filter)
  or metallic films with eddy current probe module (original NC technology)

- The combination of 4-point measurement, and layer thickness with optical probe is available
  
(NC-60F/RS-100NPT)

- The combination of transmittance measurement and color measurement is available
 
(NC-60F/RS-100NTT)

- Automatic measuring stage with X-Y-Z axes (probe module moving) and lifting pins
  , centering mechanism, ionizer, vacuum chuck board with black color

- 0.1mm meas. resolution and programmable test pattern

- 2-D, 3-D even sites mapping software