접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Manual resistivity, thickness, PN measurement instrument
EC-80TPN
- Rs : 0.01~3000 Ω/sq
- Res : 0.001~200 Ω·cm
- Thickness : 150~250 μm 
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, ITO and metal layers
- Size : 2"~8", or Max. 156mmSQ




- Easy operation and compact design

- Auto-measurement start by inserting a wafer under the sensor

- Easy mode change of resistivity and sheet resistance measurement

- Easy set up to measurement condition by JOG dial

- All-in one tool for simulaneous resistivity, thickness, and PN measurement

- 5 sites measurement mode for resistivity and thickness (option)

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 Ω·cm                    Rs : Low – 0.01~0.5 Ω/sq
            Middle – 0.05~0.5 Ω·cm                            Middle – 0.5~10 Ω/sq
            High – 0.5~60 Ω·cm                                  High – 10~1000 Ω/sq
            Super High – 60~200 Ω·cm                       Super High – 1000~3000 Ω/sq
            Solar Wafer – 0.2~15 Ω·cm                       Solar - 5~500 Ω/sq