접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Full Auto 4 point probe system
RT-3000/RS-1300
- Rs : RT-3000/S ver. 1mΩ/sq∼10MΩ/sq
          RT-3000/H ver. 10mΩ/sq∼1GΩ/sq
          (option : up to 10TΩ/sq)
- Applications : Conductive layer on glass
                        TFT, EL(OLED), CF, Metal thin film, n+a-Si layer, Solar cell
- Glass sizes : Max. 2880mm X 3080mm



- Fully automatic system for large sizes of flat panel with glass loading robot

- Tester self-test function, Measurement position correction function

- Min. 0.1 mm meas. resolution and programmable test pattern

- CIM (host) communication and 2-D/3-D Mapping software