접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
접촉식 면저항측정기 제품별 > 접촉식 면저항측정기
Fully automatic system with one cassette station by 4 point probe method
RG-2000AL(RG-3000AL)
- Res :  100μ~1M Ω・cm
- RS : 1m~10M Ω/sq
- Applications : Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc) and Others (*Please contact us for details)

















- Widest measuring range in the world and High accuracy measurement for semiconductor
- User programmable measurement pattern
- Tester self-test function
- Thickness, edge, temperature correction for silicon wafer
- Film thickness conversion function from sheet resistance
- Work efficiency with one cassette station



Applications

- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon, SiC etc)
- Others (*Please contact us for details)



Sample sizes

- 6, 8 inch (or 12 inch)



Measuring range

- [RS] 1m~10M ohm/sq
- [R] 100μ~1M ohm-cm