NRW series are resistivity reference wafers which proven by Napson’s resistivity
measurement system. NRW series use wafers with neutron irradiation, and excellent
stability.

Napson’s four-probe resistivity measurement system has been calibrated by standard
wafers (NIST, VLSI), and conforms to the standards stipulated by the following SEMI
standards, Japanese Industrial Standards (JIS)


Compliance standards

[SEMI Standards]
 SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02

[Japan Industrial Standards]
JIS-H-0602-1995


Applications

- Material : Silicon
- Production method : FZ
- Wafer finish frontside/backside : Lapped
- Wafer orientation : (1-1-1) ± 1 deg.
- Doping : N-type (Phosphorous)
- Wafer size : Φ100mm(4inch)
- Wafer Thickness : *Depends on NRW wafer type. Please refer following specs.


Wafer Types / Specifications